8/7/2010	10:07:49 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/7/2010	10:07:49 AM	Recipe started at 10:07 AM
8/7/2010	10:07:49 AM	H2 valve closed
8/7/2010	10:07:49 AM	BCl3 valve closed
8/7/2010	10:07:49 AM	PH3 valve closed
8/7/2010	10:07:49 AM	SiCl4 pre valve closed
8/7/2010	10:07:49 AM	SiCl4 post valve closed
8/7/2010	10:07:49 AM	Main Vac valve closed
8/7/2010	10:07:49 AM	Bypass valve closed
8/7/2010	10:07:49 AM	Bubbler valve closed
8/7/2010	10:07:49 AM	Helium valve opened
8/7/2010	10:07:49 AM	Helium MFC set to  500.000000
8/7/2010	10:07:49 AM	H2 MFC set to  0.000000
8/7/2010	10:07:49 AM	BCl3 MFC set to  0.000000
8/7/2010	10:07:49 AM	PHl3 MFC set to  0.000000
8/7/2010	10:07:49 AM	SiCl4 MFC set to  0.000000
8/7/2010	10:07:49 AM	Bypass solenoid MFC set to  0.000000
8/7/2010	10:07:49 AM	Tube furnace set to 0
8/7/2010	10:09:09 AM	Helium valve closed
8/7/2010	10:09:09 AM	H2 valve closed
8/7/2010	10:09:09 AM	BCl3 valve closed
8/7/2010	10:09:09 AM	PH3 valve closed
8/7/2010	10:09:09 AM	SiCl4 pre valve closed
8/7/2010	10:09:09 AM	SiCl4 post valve closed
8/7/2010	10:09:09 AM	Main Vac valve closed
8/7/2010	10:09:09 AM	Bypass valve closed
8/7/2010	10:09:09 AM	Bubbler valve closed
8/7/2010	10:09:09 AM	Helium MFC set to  0.000000
8/7/2010	10:09:09 AM	H2 MFC set to  0.000000
8/7/2010	10:09:09 AM	BCl3 MFC set to  0.000000
8/7/2010	10:09:09 AM	PHl3 MFC set to  0.000000
8/7/2010	10:09:09 AM	SiCl4 MFC set to  0.000000
8/7/2010	10:09:09 AM	Bypass solenoid MFC set to  0.000000
8/7/2010	10:09:10 AM	Tube furnace set to 0
8/7/2010	10:09:10 AM	Run finished at 10:09 AM
8/7/2010	10:09:10 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/7/2010	10:11:58 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/7/2010	10:11:59 AM	Recipe started at 10:11 AM
8/7/2010	10:11:59 AM	Helium valve closed
8/7/2010	10:11:59 AM	H2 valve closed
8/7/2010	10:11:59 AM	BCl3 valve closed
8/7/2010	10:11:59 AM	PH3 valve closed
8/7/2010	10:11:59 AM	SiCl4 pre valve closed
8/7/2010	10:11:59 AM	SiCl4 post valve closed
8/7/2010	10:11:59 AM	Main Vac valve closed
8/7/2010	10:11:59 AM	Bubbler valve closed
8/7/2010	10:11:59 AM	Bypass valve opened
8/7/2010	10:11:59 AM	Helium MFC set to  0.000000
8/7/2010	10:11:59 AM	H2 MFC set to  0.000000
8/7/2010	10:11:59 AM	BCl3 MFC set to  0.000000
8/7/2010	10:11:59 AM	PHl3 MFC set to  0.000000
8/7/2010	10:11:59 AM	SiCl4 MFC set to  0.000000
8/7/2010	10:11:59 AM	Bypass solenoid MFC set to  0.000000
8/7/2010	10:11:59 AM	Tube furnace set to 0
8/7/2010	10:12:36 AM	Helium valve closed
8/7/2010	10:12:36 AM	H2 valve closed
8/7/2010	10:12:36 AM	BCl3 valve closed
8/7/2010	10:12:36 AM	PH3 valve closed
8/7/2010	10:12:36 AM	SiCl4 pre valve closed
8/7/2010	10:12:36 AM	SiCl4 post valve closed
8/7/2010	10:12:36 AM	Bubbler valve closed
8/7/2010	10:12:36 AM	Main Vac valve opened
8/7/2010	10:12:36 AM	Bypass valve opened
8/7/2010	10:12:36 AM	Helium MFC set to  0.000000
8/7/2010	10:12:36 AM	H2 MFC set to  0.000000
8/7/2010	10:12:36 AM	BCl3 MFC set to  0.000000
8/7/2010	10:12:36 AM	PHl3 MFC set to  0.000000
8/7/2010	10:12:36 AM	SiCl4 MFC set to  0.000000
8/7/2010	10:12:36 AM	Bypass solenoid MFC set to  0.000000
8/7/2010	10:12:36 AM	Tube furnace set to 0
8/7/2010	10:12:36 AM	Run finished at 10:12 AM
8/7/2010	10:12:36 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/7/2010	1:13:37 PM	Helium valve opened
8/7/2010	1:13:39 PM	Helium MFC set to  100.000000
8/7/2010	1:13:45 PM	Tube furnace set to 100
8/7/2010	1:17:12 PM	Helium MFC set to  0.000000
8/7/2010	1:17:13 PM	Helium valve closed
8/7/2010	1:18:53 PM	Tube furnace set to 0
8/7/2010	1:19:01 PM	Recipe started at 1:19 PM
8/7/2010	1:19:01 PM	Helium valve closed
8/7/2010	1:19:01 PM	BCl3 valve closed
8/7/2010	1:19:01 PM	PH3 valve closed
8/7/2010	1:19:01 PM	SiCl4 pre valve closed
8/7/2010	1:19:01 PM	SiCl4 post valve closed
8/7/2010	1:19:01 PM	Main Vac valve closed
8/7/2010	1:19:01 PM	Bypass valve closed
8/7/2010	1:19:01 PM	Bubbler valve closed
8/7/2010	1:19:01 PM	H2 valve opened
8/7/2010	1:19:02 PM	Helium MFC set to  0.000000
8/7/2010	1:19:02 PM	H2 MFC set to  500.000000
8/7/2010	1:19:02 PM	BCl3 MFC set to  0.000000
8/7/2010	1:19:02 PM	PHl3 MFC set to  0.000000
8/7/2010	1:19:02 PM	SiCl4 MFC set to  0.000000
8/7/2010	1:19:02 PM	Bypass solenoid MFC set to  0.000000
8/7/2010	1:19:02 PM	Tube furnace set to 100
8/7/2010	1:20:21 PM	Helium valve closed
8/7/2010	1:20:21 PM	BCl3 valve closed
8/7/2010	1:20:21 PM	PH3 valve closed
8/7/2010	1:20:21 PM	SiCl4 pre valve closed
8/7/2010	1:20:21 PM	SiCl4 post valve closed
8/7/2010	1:20:21 PM	Main Vac valve closed
8/7/2010	1:20:21 PM	Bypass valve closed
8/7/2010	1:20:21 PM	H2 valve opened
8/7/2010	1:20:21 PM	Bubbler valve opened
8/7/2010	1:20:21 PM	Helium MFC set to  0.000000
8/7/2010	1:20:21 PM	H2 MFC set to  500.000000
8/7/2010	1:20:21 PM	BCl3 MFC set to  0.000000
8/7/2010	1:20:21 PM	PHl3 MFC set to  0.000000
8/7/2010	1:20:21 PM	SiCl4 MFC set to  0.000000
8/7/2010	1:20:21 PM	Bypass solenoid MFC set to  0.000000
8/7/2010	1:20:21 PM	Tube furnace set to 1000
8/7/2010	1:40:21 PM	Helium valve closed
8/7/2010	1:40:21 PM	PH3 valve closed
8/7/2010	1:40:21 PM	Main Vac valve closed
8/7/2010	1:40:21 PM	Bypass valve closed
8/7/2010	1:40:21 PM	H2 valve opened
8/7/2010	1:40:21 PM	BCl3 valve opened
8/7/2010	1:40:21 PM	SiCl4 pre valve opened
8/7/2010	1:40:21 PM	SiCl4 post valve opened
8/7/2010	1:40:21 PM	Bubbler valve opened
8/7/2010	1:40:21 PM	Helium MFC set to  0.000000
8/7/2010	1:40:21 PM	H2 MFC set to  500.000000
8/7/2010	1:40:21 PM	BCl3 MFC set to  29.000000
8/7/2010	1:40:21 PM	PHl3 MFC set to  0.000000
8/7/2010	1:40:21 PM	SiCl4 MFC set to  50.000000
8/7/2010	1:40:21 PM	Bypass solenoid MFC set to  0.000000
8/7/2010	1:40:21 PM	Tube furnace set to 1000
8/7/2010	1:47:21 PM	H2 valve closed
8/7/2010	1:47:21 PM	BCl3 valve closed
8/7/2010	1:47:21 PM	PH3 valve closed
8/7/2010	1:47:22 PM	SiCl4 pre valve closed
8/7/2010	1:47:22 PM	SiCl4 post valve closed
8/7/2010	1:47:22 PM	Main Vac valve closed
8/7/2010	1:47:22 PM	Bypass valve closed
8/7/2010	1:47:22 PM	Helium valve opened
8/7/2010	1:47:22 PM	Bubbler valve opened
8/7/2010	1:47:22 PM	Helium MFC set to  500.000000
8/7/2010	1:47:22 PM	H2 MFC set to  0.000000
8/7/2010	1:47:22 PM	BCl3 MFC set to  0.000000
8/7/2010	1:47:22 PM	PHl3 MFC set to  0.000000
8/7/2010	1:47:22 PM	SiCl4 MFC set to  0.000000
8/7/2010	1:47:22 PM	Bypass solenoid MFC set to  0.000000
8/7/2010	1:47:22 PM	Tube furnace set to 0
8/7/2010	2:07:22 PM	Helium valve closed
8/7/2010	2:07:22 PM	H2 valve closed
8/7/2010	2:07:22 PM	BCl3 valve closed
8/7/2010	2:07:22 PM	PH3 valve closed
8/7/2010	2:07:22 PM	SiCl4 pre valve closed
8/7/2010	2:07:22 PM	SiCl4 post valve closed
8/7/2010	2:07:22 PM	Main Vac valve closed
8/7/2010	2:07:22 PM	Bypass valve closed
8/7/2010	2:07:22 PM	Bubbler valve closed
8/7/2010	2:07:22 PM	Helium MFC set to  0.000000
8/7/2010	2:07:22 PM	H2 MFC set to  0.000000
8/7/2010	2:07:22 PM	BCl3 MFC set to  0.000000
8/7/2010	2:07:22 PM	PHl3 MFC set to  0.000000
8/7/2010	2:07:22 PM	SiCl4 MFC set to  0.000000
8/7/2010	2:07:22 PM	Bypass solenoid MFC set to  0.000000
8/7/2010	2:07:22 PM	Tube furnace set to 0
8/7/2010	2:07:22 PM	Run finished at 2:07 PM
8/7/2010	2:31:48 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/7/2010	2:31:49 PM	Recipe started at 2:31 PM
8/7/2010	2:31:49 PM	Helium valve closed
8/7/2010	2:31:49 PM	H2 valve closed
8/7/2010	2:31:49 PM	BCl3 valve closed
8/7/2010	2:31:49 PM	PH3 valve closed
8/7/2010	2:31:49 PM	SiCl4 pre valve closed
8/7/2010	2:31:49 PM	SiCl4 post valve closed
8/7/2010	2:31:49 PM	Main Vac valve closed
8/7/2010	2:31:49 PM	Bubbler valve closed
8/7/2010	2:31:49 PM	Bypass valve opened
8/7/2010	2:31:49 PM	Helium MFC set to  0.000000
8/7/2010	2:31:49 PM	H2 MFC set to  0.000000
8/7/2010	2:31:49 PM	BCl3 MFC set to  0.000000
8/7/2010	2:31:49 PM	PHl3 MFC set to  0.000000
8/7/2010	2:31:49 PM	SiCl4 MFC set to  0.000000
8/7/2010	2:31:49 PM	Bypass solenoid MFC set to  0.000000
8/7/2010	2:31:49 PM	Tube furnace set to 0
8/7/2010	2:32:26 PM	Helium valve closed
8/7/2010	2:32:26 PM	H2 valve closed
8/7/2010	2:32:26 PM	BCl3 valve closed
8/7/2010	2:32:26 PM	PH3 valve closed
8/7/2010	2:32:26 PM	SiCl4 pre valve closed
8/7/2010	2:32:26 PM	SiCl4 post valve closed
8/7/2010	2:32:26 PM	Bubbler valve closed
8/7/2010	2:32:26 PM	Main Vac valve opened
8/7/2010	2:32:26 PM	Bypass valve opened
8/7/2010	2:32:26 PM	Helium MFC set to  0.000000
8/7/2010	2:32:26 PM	H2 MFC set to  0.000000
8/7/2010	2:32:26 PM	BCl3 MFC set to  0.000000
8/7/2010	2:32:26 PM	PHl3 MFC set to  0.000000
8/7/2010	2:32:26 PM	SiCl4 MFC set to  0.000000
8/7/2010	2:32:26 PM	Bypass solenoid MFC set to  0.000000
8/7/2010	2:32:26 PM	Tube furnace set to 0
8/7/2010	2:32:26 PM	Run finished at 2:32 PM
8/7/2010	2:32:26 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/7/2010	2:52:47 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/7/2010	2:52:48 PM	Recipe started at 2:52 PM
8/7/2010	2:52:48 PM	H2 valve closed
8/7/2010	2:52:48 PM	BCl3 valve closed
8/7/2010	2:52:48 PM	PH3 valve closed
8/7/2010	2:52:48 PM	SiCl4 pre valve closed
8/7/2010	2:52:48 PM	SiCl4 post valve closed
8/7/2010	2:52:48 PM	Main Vac valve closed
8/7/2010	2:52:48 PM	Bypass valve closed
8/7/2010	2:52:48 PM	Bubbler valve closed
8/7/2010	2:52:48 PM	Helium valve opened
8/7/2010	2:52:48 PM	Helium MFC set to  500.000000
8/7/2010	2:52:48 PM	H2 MFC set to  0.000000
8/7/2010	2:52:48 PM	BCl3 MFC set to  0.000000
8/7/2010	2:52:48 PM	PHl3 MFC set to  0.000000
8/7/2010	2:52:48 PM	SiCl4 MFC set to  0.000000
8/7/2010	2:52:48 PM	Bypass solenoid MFC set to  0.000000
8/7/2010	2:52:48 PM	Tube furnace set to 0
8/7/2010	2:54:05 PM	Helium valve closed
8/7/2010	2:54:05 PM	H2 valve closed
8/7/2010	2:54:05 PM	BCl3 valve closed
8/7/2010	2:54:05 PM	PH3 valve closed
8/7/2010	2:54:05 PM	SiCl4 pre valve closed
8/7/2010	2:54:05 PM	SiCl4 post valve closed
8/7/2010	2:54:05 PM	Main Vac valve closed
8/7/2010	2:54:05 PM	Bypass valve closed
8/7/2010	2:54:05 PM	Bubbler valve closed
8/7/2010	2:54:05 PM	Helium MFC set to  0.000000
8/7/2010	2:54:05 PM	H2 MFC set to  0.000000
8/7/2010	2:54:05 PM	BCl3 MFC set to  0.000000
8/7/2010	2:54:05 PM	PHl3 MFC set to  0.000000
8/7/2010	2:54:05 PM	SiCl4 MFC set to  0.000000
8/7/2010	2:54:05 PM	Bypass solenoid MFC set to  0.000000
8/7/2010	2:54:06 PM	Tube furnace set to 0
8/7/2010	2:54:06 PM	Run finished at 2:54 PM
8/7/2010	2:54:06 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/7/2010	2:56:03 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/7/2010	2:56:04 PM	Recipe started at 2:56 PM
8/7/2010	2:56:04 PM	Helium valve closed
8/7/2010	2:56:04 PM	H2 valve closed
8/7/2010	2:56:04 PM	BCl3 valve closed
8/7/2010	2:56:04 PM	PH3 valve closed
8/7/2010	2:56:04 PM	SiCl4 pre valve closed
8/7/2010	2:56:04 PM	SiCl4 post valve closed
8/7/2010	2:56:04 PM	Main Vac valve closed
8/7/2010	2:56:04 PM	Bubbler valve closed
8/7/2010	2:56:04 PM	Bypass valve opened
8/7/2010	2:56:04 PM	Helium MFC set to  0.000000
8/7/2010	2:56:04 PM	H2 MFC set to  0.000000
8/7/2010	2:56:04 PM	BCl3 MFC set to  0.000000
8/7/2010	2:56:04 PM	PHl3 MFC set to  0.000000
8/7/2010	2:56:04 PM	SiCl4 MFC set to  0.000000
8/7/2010	2:56:04 PM	Bypass solenoid MFC set to  0.000000
8/7/2010	2:56:04 PM	Tube furnace set to 0
8/7/2010	2:56:39 PM	Helium valve closed
8/7/2010	2:56:39 PM	H2 valve closed
8/7/2010	2:56:39 PM	BCl3 valve closed
8/7/2010	2:56:39 PM	PH3 valve closed
8/7/2010	2:56:39 PM	SiCl4 pre valve closed
8/7/2010	2:56:39 PM	SiCl4 post valve closed
8/7/2010	2:56:39 PM	Bubbler valve closed
8/7/2010	2:56:39 PM	Main Vac valve opened
8/7/2010	2:56:39 PM	Bypass valve opened
8/7/2010	2:56:39 PM	Helium MFC set to  0.000000
8/7/2010	2:56:39 PM	H2 MFC set to  0.000000
8/7/2010	2:56:39 PM	BCl3 MFC set to  0.000000
8/7/2010	2:56:39 PM	PHl3 MFC set to  0.000000
8/7/2010	2:56:39 PM	SiCl4 MFC set to  0.000000
8/7/2010	2:56:39 PM	Bypass solenoid MFC set to  0.000000
8/7/2010	2:56:39 PM	Tube furnace set to 0
8/7/2010	2:56:40 PM	Run finished at 2:56 PM
8/7/2010	2:56:40 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/7/2010	3:28:14 PM	Helium valve opened
8/7/2010	3:28:16 PM	Helium MFC set to  100.000000
8/7/2010	3:42:52 PM	Helium valve closed
8/7/2010	3:42:54 PM	Helium MFC set to  0.000000
8/7/2010	3:50:37 PM	Helium valve opened
8/7/2010	3:50:45 PM	Helium MFC set to  100.000000
8/7/2010	3:50:50 PM	Helium MFC set to  0.000000
8/7/2010	3:50:51 PM	Helium valve closed
8/7/2010	3:52:44 PM	Recipe started at 3:52 PM
8/7/2010	3:52:44 PM	Helium valve closed
8/7/2010	3:52:44 PM	BCl3 valve closed
8/7/2010	3:52:44 PM	PH3 valve closed
8/7/2010	3:52:44 PM	SiCl4 pre valve closed
8/7/2010	3:52:44 PM	SiCl4 post valve closed
8/7/2010	3:52:44 PM	Main Vac valve closed
8/7/2010	3:52:44 PM	Bypass valve closed
8/7/2010	3:52:44 PM	Bubbler valve closed
8/7/2010	3:52:44 PM	H2 valve opened
8/7/2010	3:52:44 PM	Helium MFC set to  0.000000
8/7/2010	3:52:44 PM	H2 MFC set to  500.000000
8/7/2010	3:52:44 PM	BCl3 MFC set to  0.000000
8/7/2010	3:52:44 PM	PHl3 MFC set to  0.000000
8/7/2010	3:52:44 PM	SiCl4 MFC set to  0.000000
8/7/2010	3:52:44 PM	Bypass solenoid MFC set to  0.000000
8/7/2010	3:52:44 PM	Tube furnace set to 100
8/7/2010	3:54:03 PM	Helium valve closed
8/7/2010	3:54:03 PM	BCl3 valve closed
8/7/2010	3:54:03 PM	PH3 valve closed
8/7/2010	3:54:03 PM	SiCl4 pre valve closed
8/7/2010	3:54:03 PM	SiCl4 post valve closed
8/7/2010	3:54:03 PM	Main Vac valve closed
8/7/2010	3:54:03 PM	Bypass valve closed
8/7/2010	3:54:03 PM	H2 valve opened
8/7/2010	3:54:03 PM	Bubbler valve opened
8/7/2010	3:54:03 PM	Helium MFC set to  0.000000
8/7/2010	3:54:03 PM	H2 MFC set to  500.000000
8/7/2010	3:54:03 PM	BCl3 MFC set to  0.000000
8/7/2010	3:54:03 PM	PHl3 MFC set to  0.000000
8/7/2010	3:54:03 PM	SiCl4 MFC set to  0.000000
8/7/2010	3:54:03 PM	Bypass solenoid MFC set to  0.000000
8/7/2010	3:54:03 PM	Tube furnace set to 1000
8/7/2010	4:14:03 PM	Helium valve closed
8/7/2010	4:14:03 PM	PH3 valve closed
8/7/2010	4:14:03 PM	Main Vac valve closed
8/7/2010	4:14:03 PM	Bypass valve closed
8/7/2010	4:14:03 PM	H2 valve opened
8/7/2010	4:14:03 PM	BCl3 valve opened
8/7/2010	4:14:03 PM	SiCl4 pre valve opened
8/7/2010	4:14:03 PM	SiCl4 post valve opened
8/7/2010	4:14:03 PM	Bubbler valve opened
8/7/2010	4:14:03 PM	Helium MFC set to  0.000000
8/7/2010	4:14:03 PM	H2 MFC set to  500.000000
8/7/2010	4:14:03 PM	BCl3 MFC set to  29.000000
8/7/2010	4:14:03 PM	PHl3 MFC set to  0.000000
8/7/2010	4:14:03 PM	SiCl4 MFC set to  50.000000
8/7/2010	4:14:03 PM	Bypass solenoid MFC set to  0.000000
8/7/2010	4:14:03 PM	Tube furnace set to 1000
8/7/2010	4:19:03 PM	H2 valve closed
8/7/2010	4:19:03 PM	BCl3 valve closed
8/7/2010	4:19:03 PM	PH3 valve closed
8/7/2010	4:19:03 PM	SiCl4 pre valve closed
8/7/2010	4:19:03 PM	SiCl4 post valve closed
8/7/2010	4:19:03 PM	Main Vac valve closed
8/7/2010	4:19:03 PM	Bypass valve closed
8/7/2010	4:19:03 PM	Helium valve opened
8/7/2010	4:19:03 PM	Bubbler valve opened
8/7/2010	4:19:03 PM	Helium MFC set to  500.000000
8/7/2010	4:19:03 PM	H2 MFC set to  0.000000
8/7/2010	4:19:03 PM	BCl3 MFC set to  0.000000
8/7/2010	4:19:03 PM	PHl3 MFC set to  0.000000
8/7/2010	4:19:03 PM	SiCl4 MFC set to  0.000000
8/7/2010	4:19:03 PM	Bypass solenoid MFC set to  0.000000
8/7/2010	4:19:03 PM	Tube furnace set to 0
8/7/2010	4:39:03 PM	Helium valve closed
8/7/2010	4:39:03 PM	H2 valve closed
8/7/2010	4:39:03 PM	BCl3 valve closed
8/7/2010	4:39:03 PM	PH3 valve closed
8/7/2010	4:39:03 PM	SiCl4 pre valve closed
8/7/2010	4:39:03 PM	SiCl4 post valve closed
8/7/2010	4:39:03 PM	Main Vac valve closed
8/7/2010	4:39:03 PM	Bypass valve closed
8/7/2010	4:39:03 PM	Bubbler valve closed
8/7/2010	4:39:03 PM	Helium MFC set to  0.000000
8/7/2010	4:39:03 PM	H2 MFC set to  0.000000
8/7/2010	4:39:03 PM	BCl3 MFC set to  0.000000
8/7/2010	4:39:03 PM	PHl3 MFC set to  0.000000
8/7/2010	4:39:04 PM	SiCl4 MFC set to  0.000000
8/7/2010	4:39:04 PM	Bypass solenoid MFC set to  0.000000
8/7/2010	4:39:04 PM	Tube furnace set to 0
8/7/2010	4:39:04 PM	Run finished at 4:39 PM
8/7/2010	5:16:18 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/7/2010	5:16:18 PM	Recipe started at 5:16 PM
8/7/2010	5:16:18 PM	H2 valve closed
8/7/2010	5:16:18 PM	BCl3 valve closed
8/7/2010	5:16:18 PM	PH3 valve closed
8/7/2010	5:16:18 PM	SiCl4 pre valve closed
8/7/2010	5:16:18 PM	SiCl4 post valve closed
8/7/2010	5:16:18 PM	Main Vac valve closed
8/7/2010	5:16:18 PM	Bypass valve closed
8/7/2010	5:16:18 PM	Bubbler valve closed
8/7/2010	5:16:18 PM	Helium valve opened
8/7/2010	5:16:18 PM	Helium MFC set to  500.000000
8/7/2010	5:16:18 PM	H2 MFC set to  0.000000
8/7/2010	5:16:18 PM	BCl3 MFC set to  0.000000
8/7/2010	5:16:18 PM	PHl3 MFC set to  0.000000
8/7/2010	5:16:18 PM	SiCl4 MFC set to  0.000000
8/7/2010	5:16:18 PM	Bypass solenoid MFC set to  0.000000
8/7/2010	5:16:18 PM	Tube furnace set to 0
8/7/2010	5:16:24 PM	Helium valve closed
8/7/2010	5:16:24 PM	H2 valve closed
8/7/2010	5:16:24 PM	BCl3 valve closed
8/7/2010	5:16:24 PM	PH3 valve closed
8/7/2010	5:16:24 PM	SiCl4 pre valve closed
8/7/2010	5:16:24 PM	SiCl4 post valve closed
8/7/2010	5:16:24 PM	Main Vac valve closed
8/7/2010	5:16:24 PM	Bypass valve closed
8/7/2010	5:16:24 PM	Bubbler valve closed
8/7/2010	5:16:24 PM	Helium MFC set to  0.000000
8/7/2010	5:16:24 PM	H2 MFC set to  0.000000
8/7/2010	5:16:24 PM	BCl3 MFC set to  0.000000
8/7/2010	5:16:24 PM	PHl3 MFC set to  0.000000
8/7/2010	5:16:24 PM	SiCl4 MFC set to  0.000000
8/7/2010	5:16:24 PM	Bypass solenoid MFC set to  0.000000
8/7/2010	5:16:25 PM	Tube furnace set to 0
8/7/2010	5:16:25 PM	Run finished at 5:16 PM
8/7/2010	5:16:25 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/7/2010	5:19:03 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/7/2010	5:19:04 PM	Recipe started at 5:19 PM
8/7/2010	5:19:04 PM	Helium valve closed
8/7/2010	5:19:04 PM	H2 valve closed
8/7/2010	5:19:04 PM	BCl3 valve closed
8/7/2010	5:19:04 PM	PH3 valve closed
8/7/2010	5:19:04 PM	SiCl4 pre valve closed
8/7/2010	5:19:04 PM	SiCl4 post valve closed
8/7/2010	5:19:04 PM	Main Vac valve closed
8/7/2010	5:19:04 PM	Bubbler valve closed
8/7/2010	5:19:04 PM	Bypass valve opened
8/7/2010	5:19:04 PM	Helium MFC set to  0.000000
8/7/2010	5:19:04 PM	H2 MFC set to  0.000000
8/7/2010	5:19:04 PM	BCl3 MFC set to  0.000000
8/7/2010	5:19:04 PM	PHl3 MFC set to  0.000000
8/7/2010	5:19:04 PM	SiCl4 MFC set to  0.000000
8/7/2010	5:19:04 PM	Bypass solenoid MFC set to  0.000000
8/7/2010	5:19:04 PM	Tube furnace set to 0
8/7/2010	5:19:41 PM	Helium valve closed
8/7/2010	5:19:41 PM	H2 valve closed
8/7/2010	5:19:41 PM	BCl3 valve closed
8/7/2010	5:19:41 PM	PH3 valve closed
8/7/2010	5:19:41 PM	SiCl4 pre valve closed
8/7/2010	5:19:41 PM	SiCl4 post valve closed
8/7/2010	5:19:41 PM	Bubbler valve closed
8/7/2010	5:19:41 PM	Main Vac valve opened
8/7/2010	5:19:41 PM	Bypass valve opened
8/7/2010	5:19:41 PM	Helium MFC set to  0.000000
8/7/2010	5:19:41 PM	H2 MFC set to  0.000000
8/7/2010	5:19:41 PM	BCl3 MFC set to  0.000000
8/7/2010	5:19:41 PM	PHl3 MFC set to  0.000000
8/7/2010	5:19:41 PM	SiCl4 MFC set to  0.000000
8/7/2010	5:19:41 PM	Bypass solenoid MFC set to  0.000000
8/7/2010	5:19:41 PM	Tube furnace set to 0
8/7/2010	5:19:41 PM	Run finished at 5:19 PM
8/7/2010	5:19:41 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/7/2010	5:49:20 PM	Helium valve opened
8/7/2010	5:49:22 PM	Helium MFC set to  100.000000
8/7/2010	6:21:51 PM	Helium valve closed
8/7/2010	6:21:53 PM	Helium MFC set to  0.000000
8/7/2010	6:31:34 PM	Recipe started at 6:31 PM
8/7/2010	6:31:34 PM	Helium valve closed
8/7/2010	6:31:34 PM	BCl3 valve closed
8/7/2010	6:31:34 PM	PH3 valve closed
8/7/2010	6:31:34 PM	SiCl4 pre valve closed
8/7/2010	6:31:34 PM	SiCl4 post valve closed
8/7/2010	6:31:34 PM	Main Vac valve closed
8/7/2010	6:31:34 PM	Bypass valve closed
8/7/2010	6:31:34 PM	Bubbler valve closed
8/7/2010	6:31:34 PM	H2 valve opened
8/7/2010	6:31:34 PM	Helium MFC set to  0.000000
8/7/2010	6:31:34 PM	H2 MFC set to  500.000000
8/7/2010	6:31:34 PM	BCl3 MFC set to  0.000000
8/7/2010	6:31:34 PM	PHl3 MFC set to  0.000000
8/7/2010	6:31:34 PM	SiCl4 MFC set to  0.000000
8/7/2010	6:31:34 PM	Bypass solenoid MFC set to  0.000000
8/7/2010	6:31:34 PM	Tube furnace set to 100
8/7/2010	6:32:52 PM	Helium valve closed
8/7/2010	6:32:52 PM	BCl3 valve closed
8/7/2010	6:32:52 PM	PH3 valve closed
8/7/2010	6:32:52 PM	SiCl4 pre valve closed
8/7/2010	6:32:52 PM	SiCl4 post valve closed
8/7/2010	6:32:52 PM	Main Vac valve closed
8/7/2010	6:32:52 PM	Bypass valve closed
8/7/2010	6:32:52 PM	H2 valve opened
8/7/2010	6:32:52 PM	Bubbler valve opened
8/7/2010	6:32:52 PM	Helium MFC set to  0.000000
8/7/2010	6:32:52 PM	H2 MFC set to  500.000000
8/7/2010	6:32:52 PM	BCl3 MFC set to  0.000000
8/7/2010	6:32:52 PM	PHl3 MFC set to  0.000000
8/7/2010	6:32:52 PM	SiCl4 MFC set to  0.000000
8/7/2010	6:32:52 PM	Bypass solenoid MFC set to  0.000000
8/7/2010	6:32:53 PM	Tube furnace set to 1000
8/7/2010	6:52:53 PM	Helium valve closed
8/7/2010	6:52:53 PM	PH3 valve closed
8/7/2010	6:52:53 PM	Main Vac valve closed
8/7/2010	6:52:53 PM	Bypass valve closed
8/7/2010	6:52:53 PM	H2 valve opened
8/7/2010	6:52:53 PM	BCl3 valve opened
8/7/2010	6:52:53 PM	SiCl4 pre valve opened
8/7/2010	6:52:53 PM	SiCl4 post valve opened
8/7/2010	6:52:53 PM	Bubbler valve opened
8/7/2010	6:52:53 PM	Helium MFC set to  0.000000
8/7/2010	6:52:53 PM	H2 MFC set to  500.000000
8/7/2010	6:52:53 PM	BCl3 MFC set to  29.000000
8/7/2010	6:52:53 PM	PHl3 MFC set to  0.000000
8/7/2010	6:52:53 PM	SiCl4 MFC set to  50.000000
8/7/2010	6:52:53 PM	Bypass solenoid MFC set to  0.000000
8/7/2010	6:52:53 PM	Tube furnace set to 1000
8/7/2010	6:57:53 PM	H2 valve closed
8/7/2010	6:57:53 PM	BCl3 valve closed
8/7/2010	6:57:53 PM	PH3 valve closed
8/7/2010	6:57:53 PM	SiCl4 pre valve closed
8/7/2010	6:57:53 PM	SiCl4 post valve closed
8/7/2010	6:57:53 PM	Main Vac valve closed
8/7/2010	6:57:53 PM	Bypass valve closed
8/7/2010	6:57:53 PM	Helium valve opened
8/7/2010	6:57:53 PM	Bubbler valve opened
8/7/2010	6:57:53 PM	Helium MFC set to  500.000000
8/7/2010	6:57:53 PM	H2 MFC set to  0.000000
8/7/2010	6:57:53 PM	BCl3 MFC set to  0.000000
8/7/2010	6:57:53 PM	PHl3 MFC set to  0.000000
8/7/2010	6:57:53 PM	SiCl4 MFC set to  0.000000
8/7/2010	6:57:53 PM	Bypass solenoid MFC set to  0.000000
8/7/2010	6:57:53 PM	Tube furnace set to 0
8/7/2010	7:17:53 PM	Helium valve closed
8/7/2010	7:17:53 PM	H2 valve closed
8/7/2010	7:17:53 PM	BCl3 valve closed
8/7/2010	7:17:53 PM	PH3 valve closed
8/7/2010	7:17:53 PM	SiCl4 pre valve closed
8/7/2010	7:17:53 PM	SiCl4 post valve closed
8/7/2010	7:17:53 PM	Main Vac valve closed
8/7/2010	7:17:53 PM	Bypass valve closed
8/7/2010	7:17:53 PM	Bubbler valve closed
8/7/2010	7:17:53 PM	Helium MFC set to  0.000000
8/7/2010	7:17:53 PM	H2 MFC set to  0.000000
8/7/2010	7:17:53 PM	BCl3 MFC set to  0.000000
8/7/2010	7:17:53 PM	PHl3 MFC set to  0.000000
8/7/2010	7:17:53 PM	SiCl4 MFC set to  0.000000
8/7/2010	7:17:53 PM	Bypass solenoid MFC set to  0.000000
8/7/2010	7:17:53 PM	Tube furnace set to 0
8/7/2010	7:17:54 PM	Run finished at 7:17 PM
8/7/2010	8:36:10 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/7/2010	8:36:11 PM	Recipe started at 8:36 PM
8/7/2010	8:36:11 PM	Helium valve closed
8/7/2010	8:36:11 PM	H2 valve closed
8/7/2010	8:36:11 PM	BCl3 valve closed
8/7/2010	8:36:11 PM	PH3 valve closed
8/7/2010	8:36:11 PM	SiCl4 pre valve closed
8/7/2010	8:36:11 PM	SiCl4 post valve closed
8/7/2010	8:36:11 PM	Main Vac valve closed
8/7/2010	8:36:11 PM	Bubbler valve closed
8/7/2010	8:36:11 PM	Bypass valve opened
8/7/2010	8:36:11 PM	Helium MFC set to  0.000000
8/7/2010	8:36:11 PM	H2 MFC set to  0.000000
8/7/2010	8:36:11 PM	BCl3 MFC set to  0.000000
8/7/2010	8:36:11 PM	PHl3 MFC set to  0.000000
8/7/2010	8:36:11 PM	SiCl4 MFC set to  0.000000
8/7/2010	8:36:11 PM	Bypass solenoid MFC set to  0.000000
8/7/2010	8:36:11 PM	Tube furnace set to 0
8/7/2010	8:36:47 PM	Helium valve closed
8/7/2010	8:36:47 PM	H2 valve closed
8/7/2010	8:36:47 PM	BCl3 valve closed
8/7/2010	8:36:47 PM	PH3 valve closed
8/7/2010	8:36:47 PM	SiCl4 pre valve closed
8/7/2010	8:36:47 PM	SiCl4 post valve closed
8/7/2010	8:36:47 PM	Bubbler valve closed
8/7/2010	8:36:47 PM	Main Vac valve opened
8/7/2010	8:36:47 PM	Bypass valve opened
8/7/2010	8:36:47 PM	Helium MFC set to  0.000000
8/7/2010	8:36:47 PM	H2 MFC set to  0.000000
8/7/2010	8:36:47 PM	BCl3 MFC set to  0.000000
8/7/2010	8:36:47 PM	PHl3 MFC set to  0.000000
8/7/2010	8:36:47 PM	SiCl4 MFC set to  0.000000
8/7/2010	8:36:47 PM	Bypass solenoid MFC set to  0.000000
8/7/2010	8:36:47 PM	Tube furnace set to 0
8/7/2010	8:36:48 PM	Run finished at 8:36 PM
8/7/2010	8:36:48 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/7/2010	8:54:28 PM	Helium valve opened
8/7/2010	8:54:30 PM	Helium MFC set to  100.000000
8/7/2010	9:32:31 PM	Helium valve closed
8/7/2010	9:32:33 PM	Helium MFC set to  0.000000
8/7/2010	9:36:03 PM	Recipe started at 9:36 PM
8/7/2010	9:36:03 PM	Helium valve closed
8/7/2010	9:36:03 PM	BCl3 valve closed
8/7/2010	9:36:03 PM	PH3 valve closed
8/7/2010	9:36:03 PM	SiCl4 pre valve closed
8/7/2010	9:36:03 PM	SiCl4 post valve closed
8/7/2010	9:36:03 PM	Main Vac valve closed
8/7/2010	9:36:03 PM	Bypass valve closed
8/7/2010	9:36:03 PM	Bubbler valve closed
8/7/2010	9:36:03 PM	H2 valve opened
8/7/2010	9:36:03 PM	Helium MFC set to  0.000000
8/7/2010	9:36:03 PM	H2 MFC set to  500.000000
8/7/2010	9:36:03 PM	BCl3 MFC set to  0.000000
8/7/2010	9:36:03 PM	PHl3 MFC set to  0.000000
8/7/2010	9:36:03 PM	SiCl4 MFC set to  0.000000
8/7/2010	9:36:03 PM	Bypass solenoid MFC set to  0.000000
8/7/2010	9:36:03 PM	Tube furnace set to 100
8/7/2010	9:37:22 PM	Helium valve closed
8/7/2010	9:37:22 PM	BCl3 valve closed
8/7/2010	9:37:22 PM	PH3 valve closed
8/7/2010	9:37:22 PM	SiCl4 pre valve closed
8/7/2010	9:37:22 PM	SiCl4 post valve closed
8/7/2010	9:37:22 PM	Main Vac valve closed
8/7/2010	9:37:22 PM	Bypass valve closed
8/7/2010	9:37:22 PM	H2 valve opened
8/7/2010	9:37:22 PM	Bubbler valve opened
8/7/2010	9:37:22 PM	Helium MFC set to  0.000000
8/7/2010	9:37:22 PM	H2 MFC set to  500.000000
8/7/2010	9:37:22 PM	BCl3 MFC set to  0.000000
8/7/2010	9:37:22 PM	PHl3 MFC set to  0.000000
8/7/2010	9:37:22 PM	SiCl4 MFC set to  0.000000
8/7/2010	9:37:22 PM	Bypass solenoid MFC set to  0.000000
8/7/2010	9:37:22 PM	Tube furnace set to 1000
8/7/2010	9:57:22 PM	Helium valve closed
8/7/2010	9:57:22 PM	PH3 valve closed
8/7/2010	9:57:22 PM	Main Vac valve closed
8/7/2010	9:57:22 PM	Bypass valve closed
8/7/2010	9:57:22 PM	H2 valve opened
8/7/2010	9:57:22 PM	BCl3 valve opened
8/7/2010	9:57:22 PM	SiCl4 pre valve opened
8/7/2010	9:57:22 PM	SiCl4 post valve opened
8/7/2010	9:57:22 PM	Bubbler valve opened
8/7/2010	9:57:22 PM	Helium MFC set to  0.000000
8/7/2010	9:57:22 PM	H2 MFC set to  500.000000
8/7/2010	9:57:22 PM	BCl3 MFC set to  29.000000
8/7/2010	9:57:22 PM	PHl3 MFC set to  0.000000
8/7/2010	9:57:22 PM	SiCl4 MFC set to  50.000000
8/7/2010	9:57:22 PM	Bypass solenoid MFC set to  0.000000
8/7/2010	9:57:22 PM	Tube furnace set to 1000
8/7/2010	10:02:22 PM	H2 valve closed
8/7/2010	10:02:22 PM	BCl3 valve closed
8/7/2010	10:02:22 PM	PH3 valve closed
8/7/2010	10:02:22 PM	SiCl4 pre valve closed
8/7/2010	10:02:22 PM	SiCl4 post valve closed
8/7/2010	10:02:22 PM	Main Vac valve closed
8/7/2010	10:02:22 PM	Bypass valve closed
8/7/2010	10:02:22 PM	Helium valve opened
8/7/2010	10:02:22 PM	Bubbler valve opened
8/7/2010	10:02:22 PM	Helium MFC set to  500.000000
8/7/2010	10:02:22 PM	H2 MFC set to  0.000000
8/7/2010	10:02:22 PM	BCl3 MFC set to  0.000000
8/7/2010	10:02:22 PM	PHl3 MFC set to  0.000000
8/7/2010	10:02:22 PM	SiCl4 MFC set to  0.000000
8/7/2010	10:02:22 PM	Bypass solenoid MFC set to  0.000000
8/7/2010	10:02:22 PM	Tube furnace set to 0
8/7/2010	10:22:22 PM	Helium valve closed
8/7/2010	10:22:22 PM	H2 valve closed
8/7/2010	10:22:22 PM	BCl3 valve closed
8/7/2010	10:22:22 PM	PH3 valve closed
8/7/2010	10:22:22 PM	SiCl4 pre valve closed
8/7/2010	10:22:22 PM	SiCl4 post valve closed
8/7/2010	10:22:22 PM	Main Vac valve closed
8/7/2010	10:22:22 PM	Bypass valve closed
8/7/2010	10:22:22 PM	Bubbler valve closed
8/7/2010	10:22:22 PM	Helium MFC set to  0.000000
8/7/2010	10:22:22 PM	H2 MFC set to  0.000000
8/7/2010	10:22:22 PM	BCl3 MFC set to  0.000000
8/7/2010	10:22:22 PM	PHl3 MFC set to  0.000000
8/7/2010	10:22:22 PM	SiCl4 MFC set to  0.000000
8/7/2010	10:22:22 PM	Bypass solenoid MFC set to  0.000000
8/7/2010	10:22:23 PM	Tube furnace set to 0
8/7/2010	10:22:23 PM	Run finished at 10:22 PM
8/7/2010	10:34:02 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/7/2010	10:34:02 PM	Recipe started at 10:34 PM
8/7/2010	10:34:02 PM	Helium valve closed
8/7/2010	10:34:02 PM	H2 valve closed
8/7/2010	10:34:02 PM	BCl3 valve closed
8/7/2010	10:34:02 PM	PH3 valve closed
8/7/2010	10:34:02 PM	SiCl4 pre valve closed
8/7/2010	10:34:02 PM	SiCl4 post valve closed
8/7/2010	10:34:02 PM	Main Vac valve closed
8/7/2010	10:34:02 PM	Bubbler valve closed
8/7/2010	10:34:02 PM	Bypass valve opened
8/7/2010	10:34:02 PM	Helium MFC set to  0.000000
8/7/2010	10:34:02 PM	H2 MFC set to  0.000000
8/7/2010	10:34:02 PM	BCl3 MFC set to  0.000000
8/7/2010	10:34:02 PM	PHl3 MFC set to  0.000000
8/7/2010	10:34:02 PM	SiCl4 MFC set to  0.000000
8/7/2010	10:34:02 PM	Bypass solenoid MFC set to  0.000000
8/7/2010	10:34:03 PM	Tube furnace set to 0
8/7/2010	10:34:39 PM	Helium valve closed
8/7/2010	10:34:39 PM	H2 valve closed
8/7/2010	10:34:39 PM	BCl3 valve closed
8/7/2010	10:34:39 PM	PH3 valve closed
8/7/2010	10:34:39 PM	SiCl4 pre valve closed
8/7/2010	10:34:39 PM	SiCl4 post valve closed
8/7/2010	10:34:39 PM	Bubbler valve closed
8/7/2010	10:34:39 PM	Main Vac valve opened
8/7/2010	10:34:39 PM	Bypass valve opened
8/7/2010	10:34:39 PM	Helium MFC set to  0.000000
8/7/2010	10:34:39 PM	H2 MFC set to  0.000000
8/7/2010	10:34:39 PM	BCl3 MFC set to  0.000000
8/7/2010	10:34:39 PM	PHl3 MFC set to  0.000000
8/7/2010	10:34:39 PM	SiCl4 MFC set to  0.000000
8/7/2010	10:34:39 PM	Bypass solenoid MFC set to  0.000000
8/7/2010	10:34:39 PM	Tube furnace set to 0
8/7/2010	10:34:39 PM	Run finished at 10:34 PM
8/7/2010	10:34:39 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
